Academic Press · Cambridge University Press
| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101 | 978-1-107-41104-3 (1-107-41104-1) | 2014 | |
| Laser Microfabrication: Thin Film Processes and Lithography | 978-0-12-233430-6 (0-12-233430-2) | 1989 | Jeffrey Y. Tsao |
D. J. · Daniel E. · Daniel J. · J. E. · J. Ehrlich