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Society of Photo Optical
> Craig R. Friedrich
Craig R. Friedrich
title
ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Materials and Device Characterization in Micromachining
978-O-8194-2971-1
(O-8194-2971-6)
1998
Yuli Vladimirsky
C.F.
·
C. Friedrich
·
C.R.
·
Craig R.
·
R. F.
·
R. Friedrich
Craig R. Hersch