| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Microelectromechanical Systems: Advanced Materials and Fabrication Methods | 978-O-3O9-O598O-O (O-3O9-O598O-1) | 1998 | National Research Council · Division on Engineering and Physical Sciences · National Materials Advisory Board · Commission on Engineering and Technical Systems |