title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
MEMS Technology and Devices: Icmat 2007 Conference Proceedings, Suntec, Singapore, 1-6 July 2007 | 978-981-27O-96O-8 (981-27O-96O-6) | 2007 | Aiqun Liu · Jiuhui Wu · Chilla Damodara Reddy |
C L · C. Lu · Chun-Shien Lu