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World Scientific Pub Co Inc
> Chue San Yoo
Chue San Yoo
title
ISBN-13
(ISBN-10)
year of publication
Semiconductor Manufacturing Technology
978-981-256-823-6
(981-256-823-9)
2008
C.S.
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S.Y.
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san Y
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San Yoo
Chugunova Svetlana Mihaylovna