| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Metrology, Inspection, and Process Control for Microlithography Xxii | 978-0-8194-7107-9 (0-8194-7107-0) | 2008 | John A. Allgair |
| Metrology, Inspection, and Process Control for Microlithography XXIV | 978-0-8194-8052-1 (0-8194-8052-5) | 2010 | |
C. J. · C.R. · Christopher J. · Christopher R. · J R · J. Raymond