title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
Advances and Challenges in Chemical Mechanical Planarization: Volume 991 | 978-1-1O7-4O87O-8 (1-1O7-4O87O-9) | 2014 | Gerfried Zwicker · Laertis Economikos · Ara Philipossian |
C B · Christopher B. · Christopher Lyle Borst