C.M. · C. Mack · Chris A. Mack
| title | media type | ISBN-13 (ISBN-10) | year of publication |
|---|---|---|---|
| Fundamental Principles of Optical Lithography: The Science of Microfabrication | Hardcover | 978-0-470-01893-4 (0-470-01893-3) | 2008 |
| Fundamental Principles of Optical Lithography: The Science of Microfabrication | Paperback | 978-0-470-72730-0 (0-470-72730-6) | 2007 |