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C. D. Fung
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ISBN-13
(ISBN-10)
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tion
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Micromachining and Micropackaging of Transducers
978-O-444-4256O-7
(O-444-4256O-8)
1986
Peter W. Cheung · Wen H. Ko · David G. Fleming
C.D.
·
C.F.
·
D.F.
C. D Garmany