Bernd O. Kolbesen

titleISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Cyrstalline Defects and Contamination: Their Impact and Control in Device Manufacturing IV - DECON 2005978-1-56677-428-4
(1-56677-428-4)
2005Cor Claeys · Lazlo Fabry · Francois Tardif

Bernd O Küppers