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Electrochemical Society
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Bernd O. Kolbesen
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(ISBN-10)
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Cyrstalline Defects and Contamination: Their Impact and Control in Device Manufacturing IV - DECON 2005
978-1-56677-428-4
(1-56677-428-4)
2005
Cor Claeys · Lazlo Fabry · Francois Tardif
Bernd O Küppers