| title | ISBN-13 | year of publica- tion | other author(s) | |
|---|---|---|---|---|
| 3D IC Stacking Technology | 978-0-07-174195-8 | 2011 | Ajay Kumar · Sesh Ramaswami | |
| Extreme Ultraviolet Lithography | 978-0-07-154918-9 | 2009 | Ajay Kumar | |
| Extreme Ultraviolet Lithography | 978-3-527-40818-4 | |||
| Photomask Fabrication Technology | 978-0-07-144563-4 | 2005 | Benjamin G. Eynon | |