| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Process Engineering: Analysis in Semiconductor Device Fabrication | 978-0-07-041853-0 (0-07-041853-5) | 1993 | Stanley Middleman |
| Process Engineering Analysis in Semiconductor Device Fabrication | 978-0-07-041854-7 (0-07-041854-3) | 1993 | " |