IEEE · Society of Photo Optical
| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Optical Microlithography XV | 978-0-8194-4437-0 (0-8194-4437-5) | 2002 | |
| Optical Microlithography XVI | 978-0-8194-4845-3 (0-8194-4845-1) | 2003 | |
| Sub-100nm Cmos | 978-0-7803-6138-6 (0-7803-6138-5) | 2000 | Mark Bohr · John R. Hauser · Hiroshi Iwai · Scott E. Thompson · H.S. Philip Wong |