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Aiqun Liu
A.L.
·
A. Liu
title
ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
MEMS Technology and Devices: Icmat 2007 Conference Proceedings, Suntec, Singapore, 1-6 July 2007
978-981-27O-96O-8
(981-27O-96O-6)
2007
Jiuhui Wu · Chun Lu · Chilla Damodara Reddy
Airi Liimets