A. Kuzmichev

A. K.

titleISBN-13
(ISBN-10)
year of publication
Magnetron sputtering system. Kn. 1. Introduction to the physics and technology of magnetron sputtering / Magnetronnye raspylitelnye sistemy. Kn. 1. Vvedenie v fiziku i tekhniku magnetronnogo raspyleniya978-966-8934-O7-O
(966-8934-O7-5)
2008

A. Kuzminov