Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography (Lasers and Electro-optics Research and Technology)

Lithography

by D. O. Filatov

Paperback

ISBN: 978-1-61668-674-1

ISBN-10: 1-61668-674-X

Nova Science Pub Inc · 2010