Mems/Nems: (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS
by
Cornelius T. Leondes
Paperback
details (
USA
).
ISBN: 978-1-4899-7739-7
ISBN-10: 1-4899-7739-2
Springer
· 2016