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by Cheol Seong HwangHardcover details (USA). details (United Kingdom). details (Germany). details (Canada). ISBN: 978-1-4614-8053-2 ISBN-10: 1-4614-8053-1 Springer · 2013 |
| See also: | ||
| 2016 | Paperback | Atomic Layer Deposition for Semiconductors |
| Taschenbuch | Atomic Layer Deposition for Semiconductors | |