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by: Lars Mönch · John W. Fowler · Scott J. MasonHardcover details (USA). details (United Kingdom). details (Germany). details (Canada). ISBN: 978-1-4614-4471-8 ISBN-10: 1-4614-4471-3 Springer · 2012 |
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2012 | Paperback | Production Planning and Control for Semiconductor Wafer Fabrication Facilities: Modeling, Analysis, and Systems |