Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators (Microsystems)

Microscanners

by: Gerhard Lammel · Sandra Schweizer · Philippe Renaud

Paperback

ISBN: 978-1-4419-4946-2

ISBN-10: 1-4419-4946-1

Springer · 2010

See also:
2002HardcoverOptical Microscanners and Microspectrometers using Thermal Bimorph Actuators (Microsystems)