Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS

by Kiyotaka Wasa Hardcover details (United States). (see also: eBook (Kindle)) details (United Kingdom). (see also: eBook (Kindle)) details (Germany). (see also: Kindle Ausgabe) details (Canada). (see also: eBook (Kindle)) ISBN: 978-1-4377-3483-6 ISBN-10: 1-4377-3483-9 William Andrew · 2012