Principles and Applications of NanoMEMS Physics (Microsystems)
by
Hector Santos
Hardcover
details (
USA
).
ISBN: 978-1-4020-3238-7
ISBN-10: 1-4020-3238-2
Springer
· 2005
See also (possibly by other authors):
2008
Paperback
Principles and Applications of NanoMEMS Physics