International Symposium on Plasma and Process-Induced Damage: 1996-2001 Proceedings
by Calif.)) International Symposium on Plasma Process-Induced Damage (6th : 2001 : Monterey
CD-ROM
details (USA).
ISBN: 978-0-9651577-6-6
ISBN-10: 0-9651577-6-8
IEEE · 2001