| year of publication | ISBN | author(s) | title |
|---|---|---|---|
| 1986 | 978-0-9616721-3-3 | Stanley Wolf · Richard N. Tauber | Silicon Processing for the VLSI Era, Vol. 1: Process Technology |
| 1990 | 978-0-9616721-4-0 | Stanley Wolf · Richard N. Tauber | Silicon Processing for the VLSI Era, Vol. 2: Process Integration |
| 1994 | 978-0-9616721-5-7 | Stanley Wolf | Silicon Processing for the VLSI Era, Vol. 3: The Submicron MOSFET |
| 1999 | 978-0-9616721-6-4 | Stanley Wolf · Richard N. Tauber | Silicon Processing for the VLSI Era, Vol. 1: Process Technology |
| 2002 | 978-0-9616721-7-1 | Stanley Wolf | Silicon Processing for the VLSI Era, Vol. 4: Deep-Submicron Process Technology |
| 2003 | 978-0-9616721-8-8 | '' | Microchip Manufacturing |