Nanolithography: The Art of Fabricating Nanoelectronics, Nanophotonics and Nanobiology Devices and Systems (Woodhead Publishing Series in Electronic ... and Nanophotonic Devices and Systems

by Martin Feldman Hardcover details (UK). (see also: eBook (Kindle)) details (USA). (see also: eBook (Kindle)) details (Germany). (see also: Kindle Ausgabe) details (Canada). (see also: eBook (Kindle)) ISBN: 978-0-85709-500-8 ISBN-10: 0-85709-500-5 Woodhead Publishing Ltd · 2013