MEMS: Design and Fabrication (Mechanical Engineering)
by
Mohamed Gad-el-Hak
Hardcover
details (
United States
).
ISBN: 978-0-8493-9138-5
ISBN-10: 0-8493-9138-5
CRC Press
· 2005
See also:
2019
Paperback
MEMS: Design and Fabrication