Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition (NANO- AND MICROSCIENCE, ENGINEERING, TECHNOLOGY, AND MEDICINE SERIES)

by Sergey Edward Lyshevski Hardcover details (United States). (see also: eBook (Kindle) · eBook (Kindle)) details (UK). (see also: eBook (Kindle) · eBook (Kindle)) details (Germany). (see also: Kindle Ausgabe · Kindle Ausgabe) details (Canada). (see also: eBook (Kindle) · eBook (Kindle)) ISBN: 978-0-8493-2838-1 ISBN-10: 0-8493-2838-1 CRC Press · 2005