Third International Symposium on Laser Precision Microfabrication

by: Isamu Miyamoto · Kojiro F. Kobayashi · Koji Sugioka · Reinhart Poprawe · Henry Helvajian

Paperback

ISBN: 978-0-8194-4601-5

ISBN-10: 0-8194-4601-7

Society of Photo Optical · 2003

See also:
2004PaperbackFifth International Symposium On Laser Precision Microfabrication (Proceedings of Spie)