Device and Process Technologies for Mems and Microelectronics: 27-29 October 1999 Royal Pines Resort, Queensland, Australia (Proceedings of Spie)

Technologies

by: Kevin Chau · Sima Dimitrijev

Paperback

details (USA).

ISBN: 978-0-8194-3493-7

ISBN-10: 0-8194-3493-0

Society of Photo Optical · 1999