Micromachined Devices and Components V: 20-21 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3876)

Micromachined

by: Society of Photo-Optical Instrumentation Engineers · Solid State Technology (Organization)

Paperback

details (USA).

ISBN: 978-0-8194-3473-9

ISBN-10: 0-8194-3473-6

Society of Photo Optical · 1999