Micromachining and Microfabrication Process Technology V: 20-22 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3874)

Instrumentation

by: Society of Photo-Optical Instrumentation Engineers · Solid State Technology (Organization)

Paperback

details (USA).

ISBN: 978-0-8194-3471-5

ISBN-10: 0-8194-3471-X

Society of Photo Optical · 1999