Miniaturized Systems With Micro-Optics and Micromechanics III: 26-27 January 1998, San Jose, California (Proceedings of Spie--The International Society for Optical Engineering, V. 3276.)

Micromechanics

by Society of Photo-Optical Instrumentation Engineers

Paperback

ISBN: 978-0-8194-2715-1

ISBN-10: 0-8194-2715-2

Society of Photo Optical · 1998