Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays: 8-9 August 1996, Denver, Colorado (SPIE proceedings series)

Paperback details (USA). ISBN: 978-0-8194-2250-7 ISBN-10: 0-8194-2250-9 SPIE-The International Society for Optical Engineering · 1996