by: Chris R. Kleijn · Christoph Werner
Hardcover
ISBN: 978-0-8176-2858-1
ISBN-10: 0-8176-2858-4
Birkhauser · 1993
|
|
by: Chris R. Kleijn · Christoph WernerHardcover
ISBN: 978-0-8176-2858-1 ISBN-10: 0-8176-2858-4 Birkhauser · 1993 |
| See also: | ||
| 2013 | Taschenbuch | Modeling of Chemical Vapor Deposition of Tungsten Films (Progress in Numerical Simulation for Microelectronics) |