Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices (Nato Science Partnership Subseries: 3)

Partnership

by: Eric Garfunkel · Evgeni Gusev · Alexander Vul'

Paperback

ISBN: 978-0-7923-5008-8

ISBN-10: 0-7923-5008-1

Springer · 1998

See also:
1998HardcoverFundamental Aspects of Ultrathin Dielectrics on Si-based Devices (Nato Science Partnership Subseries: 3)