2007 Micro-electro-mechanical Systems

Hardcover

ISBN: 978-0-7918-4775-6

ISBN-10: 0-7918-4775-6

American Society of Mechanical Engineers,U.S. ยท 2007

See also:
 PaperbackMICRO-ELECTRO-MECHANICAL SYSTEMS (I00690)
 DigitalMicro Electro Mechanical Systems (Micro/Nano Technologies)