Microelectromechanical Systems (MEMS)

Hardcover

ISBN: 978-0-7918-4224-9

ISBN-10: 0-7918-4224-X

American Society of Mechanical Engineers,U.S.

See also:
2005PaperbackMICROELECTROMECHANICAL SYSTEMS (H01299)
2003PaperbackMICROELECTROMECHANICAL SYSTEMS (I00606)