Microelectromechanical Systems (Mems): Micromechanical Systems, Microscale Energy Transport: Presented at the 1997 International Mechanical ... Exposition, November (Dsc (Series), Vol. 62.)
Hardcover
details (USA).
ISBN: 978-0-7918-1843-5
ISBN-10: 0-7918-1843-8
Amer Society of Mechanical · 1997