Micromechanical Sensors Actuators and Systems: Presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, Georgia, December 1-6, 1991 (Dsc (Series), Vol. 32.)

by: Ga.) American Society of Mechanical Engineers. Winter Meeting (1991 : Atlanta · American Society of Mechanical Engineers Dynamic Systems and Control Division · American Society of Mechanical Engineers Heat Transfer Division · American Society of Mechanical Engineers Advanced Energy Systems divis Paperback details (USA). ISBN: 978-0-7918-0863-4 ISBN-10: 0-7918-0863-7 Amer Society of Mechanical · 1991