Twelfth IEEE International Conference on Micro Electro Mechanical Systems: 1999: Orlando, Florida, U S A, January 17-21, 1999
by
Fla.) IEEE Workshop on Micro Electro Mechanical Systems (12th : 1999 : Orlando
Paperback
details (
USA
).
ISBN: 978-0-7803-5194-3
ISBN-10: 0-7803-5194-0
IEEE
· 1999