IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems: Proceedings: An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems

by Calif.) IEEE Workshop on Micro Electro Mechanical Systems (9th : 1996 : San Diego

Paperback

details (USA).

ISBN: 978-0-7803-2985-0

ISBN-10: 0-7803-2985-6

IEEE · 1996