Ion Implantation Technology: 16th International Conference on Ion Implantation Technology; IIT 2006 (AIP Conference Proceedings / Accelerators, Beams, and Instrumentations)
by: Karen J. Kirkby · Russell M. Gwilliam · Andy Smith · David Chivers
CD-ROM
details (USA).
ISBN: 978-0-7354-0366-6
ISBN-10: 0-7354-0366-X
American Institute of Physics · 2006