Film Deposition by Plasma Techniques (Springer Series on Atoms and Plasmas)
by
Mitsuharu Konuma
Hardcover
details (
USA
).
ISBN: 978-0-387-54057-3
ISBN-10: 0-387-54057-1
Springer Verlag
· 1992
See also:
1992
Taschenbuch
Film Deposition by Plasma Techniques (Springer Series on Atomic, Optical, and Plasma Physics, Band 10)
1992
Gebundene Ausgabe
Film Deposition by Plasma Techniques (Springer Series on Atomic, Optical, and Plasma Physics)
