by: Germany) Ion Implantation School (1982 Berchtesgaden · H. Glawischnig · Germany) International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden
Hardcover
ISBN: 978-0-387-11878-9
ISBN-10: 0-387-11878-0
Springer Verlag · 1983