Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering)
by
Stephen A. Campbell
Paperback
details (
UK
).
ISBN: 978-0-19-986122-4
ISBN-10: 0-19-986122-6
OUP USA
· 2012
See also:
2008
Paperback
Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Engineering)