Thin Films. Modeling of Film Deposition for Microelectronic Applications, Volume 22
by:
Ronald Powell
·
John L. Vossen
·
Maurice H. Francombe
·
Abraham Ulman
Hardcover
details (
USA
).
ISBN: 978-0-12-533022-0
ISBN-10: 0-12-533022-7
Academic Press
· 1996