Materials and Processes for Submicron Technologies: Proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS ... Research Society Symposia Proceedings)

by: J.M. Martinez-Duart · R. Madar · R.A. Levy Hardcover details (UK). ISBN: 978-0-08-043617-3 ISBN-10: 0-08-043617-X Elsevier Science · 1999