Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment: Volume 81 (European Materials Research Society Symposia Proceedings)

by: H. Richter · P. Wagner · G. Ritter Hardcover details (UK). (see also: Unbound) ISBN: 978-0-08-043609-8 ISBN-10: 0-08-043609-9 Elsevier Science · 1999