Yuzhuo Li

John Wiley & Sons

titleISBN-13
(ISBN-10)
year of publica-
tion
Microelectronic Applications of Chemical Mechanical Planarization978-0-471-71919-9
(0-471-71919-6)
2007

Y. Li · Yeqiu Liu · Yikai Li · Yiqi Luo · Yixu Lü · Yossi Loya

Yvan Lallemand