| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing | 978-0-12-533026-8 (0-12-533026-X) | 1999 | Ronald A. Powell |
Stefanie Rosenkranz · Stephan Rixinger · Stéphane Rusinek · Stephen M. Rossnagel · Stephen Resnick